6

Single-Source CVD of MgAl2O4

Year:
1998
Language:
english
File:
PDF, 193 KB
english, 1998
8

Chemical vapor deposition of Al2O3 films using highly volatile single sources

Year:
1997
Language:
english
File:
PDF, 188 KB
english, 1997
22

Single Source CVD of LiAlO2

Year:
1997
Language:
english
File:
PDF, 1.14 MB
english, 1997